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Robust mask-layout and process synthesis in micro-electro-mechanical-systems (MEMS) using genetic algorithms
2001 · California Institute of Technology · doctoral · Mechanical Engineering
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@misc{academicancestry_caltechthesis_caltechthesis_3279,
author = {{Academic Ancestry}},
title = {{Robust mask-layout and process synthesis in micro-electro-mechanical-systems (MEMS) using genetic algorithms: record of a thesis}},
year = {2026},
url = {https://academicancestry.org/thesis/caltechthesis/caltechthesis%3A3279},
note = {read on 2026-10-22}
}apa
Academic Ancestry. (2026, October 22). Robust mask-layout and process synthesis in micro-electro-mechanical-systems (MEMS) using genetic algorithms: Record of a thesis [Read on 2026-10-22]. https://academicancestry.org/thesis/caltechthesis/caltechthesis%3A3279